INFINX HALOVAC 140 OIL Semiconductor Manufacturing 1012 1015 Average Molecular Weight

1012 1015 Average Molecular Weight g/mol 521 521 500 521 Water Solubility ppmw 7 7 20 7 Ozone Depletion Potential (ODP)

77 Vapor Pressure torr 17 17 Specific Heat cal/g·°C 0

Pour Point °C

instruments

55 Gallon Drum (551lb/250kg)

INFINX HALOVAC 140 OIL Semiconductor Manufacturing 1012 1015 Average Molecular WeightInfinX HaloVac 140 is a premium vacuum pump fluid oil designed for use in mechanical vacuum pumps at moderate temperatures. Formulated using Halocarbon PFPE Technology, this vacuum pump oil is safe for use across a broad range of applications, particularly in the semiconductor industry and laboratories. InfinX HaloVac 140 is chemically inert and nonflammable and provides superior lubrication. InfinX HaloVac 140 is universally compatible with most